SUBTRONIC Line

SUBTRONIC purifiers

 

The SUBTRONIC Line was developped to fit the needs of the semi-conductor industry and the demand of research labs.

The constant evolution of the field, at the technological edge, has induced a constant upgrade of the SERTRONIC purifiers.

The SUBTRONIC Line purifiers make it possible to obtain gases at such a purity that most of the time the remaining impurities can’t be decteted by the gas analysers.The impurities level is in the ppb (part per billion) range.

SUBTRONIC LineSUBTRONIC LineSUBTRONIC Line
Purifier type N15-15/ SAC 30-230
Purifier SAC 5-220
Type N Purifier (Air Liquide)

 

These purifiers conform to the latest european standards (DESP CE97/23, ATEX…), and can be optimized to fit specific customer’s requirements.

The purifiers are managed entirely via an HMI automaton with a touch screen panel, allowing supervisors to check the operation with one glance.

The purifiers are low-maintenance since they necessitate only one intervention per year.

 

 
TypeGas treatedImpurities eliminated
CNoble gases (N2, He, Ar, Kr, Xe, Ne)O2, H2O, H2
DHydrogenO2, CO, CO2, H2O
EFHydrogen, HeliumN2, Ar, O2, CO, CO2, H2O, CH4
MHydrogène, HéliumN2, Ar, O2, CO, CO2, H2O, CH4
NNoble gases (N2, He, Ar, Kr, Xe, Ne)O2, CO, CO2, H2O
SACAir, Helium, Noble gasesWater